The present invention provides doped titania-doped silica glass articles having low thermal expansions and low variations in thermal expansion. According to one embodiment of the invention, a titania-doped silica glass article has a titania content of between about 5 wt % and about 9 wt %; a coefficient of thermal expansion of between about -30 ppb/.degree. C. and about +30 ppb/.degree. C. at a temperature between 15.degree. C. and 30.degree. C.; and a variation in coefficient of thermal expansion of less than about 5 ppb/.degree. C. at a temperature between 15.degree. C. and 30.degree. C.