A projection optical system is provided for projecting a pattern on an
object surface onto an image surface in a reduced size. The projection
optical system has six reflective surfaces that include, in order of
reflecting light from the object surface, a first reflective surface, a
second convex reflective surface, a third convex reflective surface, a
fourth reflective surface, a fifth reflective surface and a sixth
reflective surface. An aperture stop is provided along an optical path
between the first and second reflective surfaces. The following condition
is met by the system, where L1 is an interval between the object surface
and the surface apex that is the closest to the object surface, and L2 is
an interval between the surface apex of the first reflective surface and
the surface apex that is the closest to the object surface:<<
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