A UV-transmissable window assembly for a DMD device includes a
UV-transmissable glass window provided in a frame. The window and frame
are bonded together to preferably effect a hermetic seal therebetween.
Optical coatings specific to the intended wavelength of light
transmission are applied to the inner and outer surfaces of the glass
window to reduce reflection and increase light transmission therethrough.
The window assembly, and DMD provided with the same, is adapted for
excellent transmission of ultraviolet light, even at the deep ultraviolet
portion of the spectrum. The DMD window assembly has application in the
medical arts, both surgery and device manufacture, in the production of
integrated circuits (IC), and in other optical lithography applications,
among other fields.