A method of forming the active region of an optoelectronic device
incorporating semiconductor quantum dots whose ground state emission
occurs at wavelengths beyond 1350 nm at a temperature of substantially
293 K is provided by forming a first layer of quantum dots covered by a
spacer layer with strained areas extending there through. The spacer
layer then forms a template upon which quantum dots of an active layer
may be formed with a surface with a surface density and formation that is
influenced by the underlying first layer of quantum dots. This allows a
choice of growth parameters more favourable to the formation of quantum
dots in the active layer emitting at long wavelengths with a narrow
inhomogeneous broadening. As an example, the active layer of quantum dots
may be formed at a lower temperature than the first layer of quantum
dots. The quantum dots of the active layer are then subject to less
intermixing with the surrounding spacer and capping layers, and can also
preserve a more strain-relaxed state, which results in a longer
wavelength emission with a narrower inhomogeneous broadening. This method
is particularly well suited to the growth of the active region of an
optoelectronic device on a GaAs substrate.