An electrode for lithium secondary battery having a current collector and, deposited thereon, a thin film comprising silicon as a main component, characterized in that the thin film comprising silicon contains at least one of the elements belonging to the groups IIIa, Iva, Va, VIa, VIIa, VIII, Ib and IIb in the fourth, fifth and sixth periods of the Periodic Table (exclusive of copper (Cu)) at least in the surface portion thereof.