A process for packaging semiconductor devices for flip chip and wire bond
applications, wherein specific materials of the semiconductor devices are
protected during device processing sequences and dicing procedures, has
been developed. After definition of copper interconnect structures
surrounded by a low k insulator layer, a protective, first photosensitive
polymer layer comprised with a low dielectric constant is applied. After
definition of openings in the first photosensitive polymer layer exposing
portions of the top surface of the copper interconnect structures, a
dicing lane opening is defined in materials located between copper
interconnect structures. Conductive redistribution shapes are formed on
the copper interconnect structures exposed in the openings in the first
photosensitive polymer layer, followed by application of a protective,
second photosensitive polymer layer. An opening is defined in the second
photosensitive polymer layer exposing a portion of the top surface of a
redistribution shape followed by placement of a solder ball in this
opening. A reflow anneal procedure results in the solder ball wetting and
overlying only the portion of the redistribution shape exposed in the
opening in the second photosensitive polymer layer. Separation of the
solder ball, flip chip regions from the non-solder ball, wire bond
regions is accomplished via a dicing procedure performed in the dicing
lane.