The invention relates to a device for determining the non precise placement of measuring sites on measuring sensors and for reducing measuring errors, which result from the movement between the measuring sites and the measuring sensors when measuring the most diverse quantities to be measured, with the aim of creating robust measuring systems for recording measured values under real or challenging conditions. The invention is characterized by: detecting whether and which sensor elements are covered and thus in contact with the site to be measured; tracking and/or adapting the sensor elements so that the contact is not interrupted even during movements, and; the resilient arrangement of the contacts for constantly maintaining the mechanical bearing pressure when measuring the electrical skin resistance. The measurement data are processed further by software that determines the area of contact from the signals from the device and from the knowledge of the arrangement of the measuring elements, and uses the completely covered sensor elements determined thereby in order to conduct measurements with the fewest possible number of errors.

 
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> Method and device for the high-precision machining of the surface of an object, especially for polishing and lapping semiconductor substrates

~ 00316