The present invention is directed at a coherence test reticle or
lithographic plate, and a method for testing the coherence of a laser
beam using the test reticle. The quality or coherence of the laser beam
is measured by illuminating the test reticle and recording and/or
analyzing the optical patterns generated by the illumination. The
technique was designed for the characterization of laser-based systems
via the detection of optical radiation modulated by transmissive,
reflective and diffractive patterns printed on a reticle or lithographic
plate designed specifically for this purpose. The novelty and advantages
over the prior art are insensitivity to vibration, alignment, and
multi-path differences associated with classical interferometric
coherence measurement techniques. The technique is focus error
insensitive. The robustness and convenience of the technique is driven by
the use of a single plate with no optical alignment, making the technique
easily implemented in the field.