A CMP abrasive comprising a cerium oxide slurry containing cerium oxide
particles, a dispersant and water, and a liquid additive containing a
dispersant and water; and a liquid additive for the CMP abrasive. A
method for polishing a substrate which comprises holding a substrate
having, formed thereon, a film to be polished against a polishing pad of
a polishing platen, followed by pressing, and moving the substrate and
the polishing platen while supplying the above CMP abrasive in between
the film to be polished and the polishing pad to thereby polish the film
to be polished. The CMP abrasive and the method for polishing can be used
for polishing a surface to be polished such as a silicone oxide film or a
silicon nitride film without contaminating the surface to be polished
with an alkali metal such as sodium ions and with no flaws, and the CMP
abrasive is excellent in storage stability.