Methods and apparatus for collecting heat within a precision stage system
substantially without introducing significant disturbance forces to the
system are disclosed. According to one aspect of the present invention, a
method for substantially removing heat from a first location within an
overall stage apparatus includes providing the heat from the first
location to a heat transferring mechanism that carries the heat away from
the first location. The heat is transferred from the heat transferring
mechanism to a second location associated within the stage apparatus. The
second location includes a material that is arranged to store the
transferred heat. The method also includes storing the heat substantially
within the material. In one embodiment, the heat is generated at the
first location.