An apparatus for and methods of control of a fluid flow. In a system for
supercritical processing of an object, the apparatus includes a measuring
device for measuring a pump performance parameter and a controller for
adjusting a fluid flow in response to the performance parameter. The
system further includes a processing chamber for performing a
supercritical process and a device for circulating at least one of a
gaseous, liquid, supercritical and near-supercritical fluid within the
processing chamber. A method of control of a fluid flow includes the
steps of: measuring a pump performance parameter; comparing a measured
pump performance parameter to a predetermined target pump performance
parameter; and adjusting a fluid flow in response to a difference in the
measured pump performance parameter and the predetermined target pump
performance parameter.