A vapor deposition apparatus for coating an item has a cleanroom side that
is accessible from inside a cleanroom and a service side that is not
accessible from inside the cleanroom. The apparatus has a vaporizer for
vaporizing solid coating material and a pyrolysis furnace for heating the
vaporized coating material to form a pyrolized gaseous coating material.
A deposition enclosure defines a deposition chamber for receiving an item
to be coated. The deposition enclosure has an inlet for flow of pyrolized
gaseous coating material into the deposition chamber, an outlet for flow
of pyrolized gaseous coating material from the deposition chamber, an
access door for accessing the deposition chamber from the cleanroom side
of the apparatus, and a service door for accessing the deposition chamber
from the service side of the apparatus.