A method for forming a transparent electrode film is provided. The method
includes: forming an insulating film on a substrate material, forming a
contact hole in the insulating film, and coating a region where a
transparent conductive film is to be formed with a liquid containing a
precursor of the transparent conductive film. The liquid coats any
unnecessary insulating film formed on the substrate material inside the
contact hole when the contact hole is formed. The liquid is a solvent
containing fluorine capable of dissolving the unnecessary insulating
film. By annealing the liquid to volatilize the components of the
unnecessary insulating film dissolved in the precursor substance of the
transparent conductive film, the unnecessary insulating film is removed.