An integrated type optical coupling device capable of easily accurately
performing an optical arrangement between a narrow-pitch multi-channel
optical waveguide and an optical fiber array and a master used in
fabricating the same are provided. By forming a fixing projection between
the optical fibers, the dynamic stability of the optical fiber array is
increased and the optical arrangement between the optical waveguide and
the optical fiber is easily accurately performed by hand. Accordingly,
the cost required for the alignment is reduced and the alignment error
due to the rolling of the optical fiber is not generated. In addition,
the multi-step metal master is fabricated by using a photoresist film for
X-ray exposure, and the narrow-pitch multi-channel optical coupling
device is fabricated in a hot embossing method using the same, thereby
the high-integrated device can be fabricated at a low price.