The present invention is directed toward a system to vary dimensions of a
substrate, such as a template having a patterned mold. To that end, the
system includes a substrate chuck adapted to position the substrate in a
region; a pliant member; and an actuator sub-assembly elastically coupled
to the substrate chuck through the pliant member. The actuator assembly
includes a plurality of lever sub-assemblies, one of which includes a
body lying in the region and spaced-apart from an opposing body
associated with one of the remaining lever sub-assemblies of the
plurality of lever sub-assemblies. One of the plurality of lever
assemblies is adapted to vary a distance between the body and the
opposing body. In this manner, compressive forces may be applied to the
template to remove unwanted magnification or other distortions in the
pattern on the mold. The pliant member is configured to attenuate a
magnitude of resulting forces sensed by the substrate chuck generated in
response to the compressive forces.