Methods are provided to improve the adhesive bonding of a semiconductor
die to a substrate through an adhesive paste by forming a layer of
silicon dioxide on the back surface of the semiconductor die prior to
applying the adhesive paste. Contacting the semiconductor die with ozone,
in a gas mixture or in a mixture with water provides rapid oxidation of
the silicon layer at the back of the semiconductor die to a silicon
dioxide layer of at least 10 angstroms thick, which is sufficient to
greatly improve bonding to the adhesive. The formation of a silicon
dioxide surface layer prior to application of the adhesive is
particularly beneficial when combined with rapid, snap curing processes,
where the adhesive can be reliably cured by heating the semiconductor die
for less than about 1 minute.