A system for operation verification of a semiconductor integrated circuit
has a central processing unit, a design layout memory unit storing design
layout information including the design layout configuration of the
semiconductor integrated circuit, and a predicted final layout memory
storing a predicted final layout configuration predicted by the central
processing unit by adding an optical proximity effect to the design
layout configuration. The system further has a netlister which describes
a procedure for causing the central processing unit to produce a
plurality of net lists in which different physical values are registered
for a common element in the predicted final layout configuration, a
netlist memory unit the plurality of net lists, and a circuit simulator
which describes a procedure for causing the central processing unit to
perform operation verification of the semiconductor integrated circuit by
using an arbitrary one of the plurality of net lists.