An image reading apparatus which enables the area occupied by the apparatus to be made small and can stably transport even a thick sheet having stiffness. A sheet P contained in an inclined sheet containing portion 3 is transported to image reading portions 8 and 9 by a vertically extending first sheet transporting path R1, and an image on the sheet P is read by the image reading portions 8 and 9, and the sheet P on which the image has been read is delivered to a substantially horizontal delivery stacking portion 14 by a substantially horizontally extending second sheet transporting path R2. The image reading portion 9 is provided between the vertically extending first sheet transporting path R1 and the substantially horizontally extending second sheet transporting path R2, and in the image reading portion 9, the transport direction of the sheet P passed along the first sheet transporting path R1 is changed to a direction toward the second sheet transporting path R2.

 
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> Illumination optical system, exposure apparatus, and device manufacturing method using the same

~ 00320