A composite bond pad that is resistant to external forces that may be
applied during probing or packaging operations is presented. The
composite bond pad includes a non-self-passivating conductive bond pad
(134) that is formed over a semiconductor substrate (100). A dielectric
layer (136) is then formed over the conductive bond pad (134). Portions
of the dielectric layer (136) are removed such that the dielectric layer
(136) becomes perforated and a portion of the conductive bond pad (134)
is exposed. Remaining portions of the dielectric layer (136) form support
structures (138) that overlie that bond pad. A self-passivating
conductive capping layer (204) is then formed overlying the bond pad
structure, where the perforations in the dielectric layer (136) allow for
electrical contact between the capping layer (204) and the exposed
portions of the underlying bond pad (134). The support structures (138)
provide a mechanical barrier that protects the interface between the
capping layer (204) and the bond pad (134). Additional mechanical
robustness is achieved when the support structures (138) remain coupled
to the unremoved portion of the dielectric layer (136), as forces
buffered by the support structures (138) are distributed across the
dielectric layer (136) and not concentrated at the bond pad location.