The present invention provides a thin-film transistor that is formed by
using a patterning method capable of forming a semiconductor channel
layer in sub-micron order and a method for manufacturing thereof that
provides a thin-film transistor with a larger area, and suitable for mass
production. These objects are achieved by a thin-film transistor formed
on a substrate 1 with a finely processed concavoconvex surface 2, in
which a source electrode and a drain electrode are formed on adjacent
convex portions of the concavoconvex surface 2, with a channel and a gate
being formed on a concave area between the convex portions. A gate
electrode 5, a gate insulating film 6 and a semiconductor channel layer 7
are laminated in this order on the concave area from the bottom surface
of the concave portion toward the top surface. Preferably, in this
thin-film transistor, the concavoconvex surface is formed of a curing
resin, a semiconductor constituting a thin-film transistor is formed of a
semiconductor such as polycrystal silicon or an organic semiconductor
material, and the substrate is formed of glass, plastic or a composite
material of these materials.