A molecular drag vacuum pump configured for pumping a gas stream from an
inlet to an outlet, the pump including a high-speed spinning disk or
rotor disposed within a housing. A passageway is formed inside the
housing adjacent the disk, and gas comes in contact with surfaces of the
spinning disk in successive stages, conformable wipers being disposed
adjacent the spinning disk to direct the gas stream to the successive
stages. The disk can be powered by an integrated motor, comprising
permanent magnets associated with the disk and cooperating coils
associated with the housing. The wipers can include parallel ridges on a
contacting face to facilitate creation of a conformable fit with the
rotor. Seal rings may be disposed against the disk between gas
passageways to reduce leakage therebetween, and the pump may include
regenerative pumping pockets to help prevent backflow. The housing may
have a modular configuration to allow two or more pump modules to be
connected and operate in series. Successive stages may be independently
or commonly powered, and may counter-rotate.