A production process of a chemical amplification-type resist composition,
which is a process for producing a chemical amplification-type
composition comprising: (A) a compound capable of generating an acid upon
irradiation with actinic rays or radiation; (B) a resin of which
solubility in an alkali developer is changed under an action of an acid;
(C) a basic compound; (D) a surfactant; and (E) a solvent, the production
process comprising: preparing a solution containing the component (A);
and mixing the solution containing the component (A) with the components
(B) to (E), and a chemical amplification-type resist composition produced
by the production process.