Reduction Talbot interference imaging is carried out using a glass or
fused silica prism, where at least two surfaces within the prism allow
for an increase in the propagating ray angles at the image plane compared
to the object (the photomask) plane. Furthermore, by adding a second
orthogonal pair of surfaces, X and Y order recombination is made possible
thus allowing for the imaging in an orthogonal direction with a two-order
interference scheme as well as repeating checkerboard (island and hole)
patterns with a four-order interference scheme. A benefit of the
invention is the reduced requirements of the photo mask, allowing for
diffraction limited imaging with UV wavelengths in a media with index of
unity (air) or larger (an immersion fluid). The prism interferometer is
known as a Smith-Talbot prism lens.