A plasma processing apparatus for providing plasma processing to an object
placed inside a processing chamber includes a vacuum chamber, a process
gas feeder feeding gas into the vacuum chamber, a wafer electrode
disposed within the vacuum chamber for mounting the object, a wafer bias
power generator supplying bias voltage to the wafer electrode, and a
plasma generator for generating plasma within the vacuum chamber. The
wafer bias power generator includes a clip circuit for clipping either a
positive-side voltage or a negative-side voltage to a predetermined
voltage.