There is disclosed a polymer containing at least a repeating unit
represented by the following general formula (1), and the resist
composition containing the polymer as a base resin, especially a
chemically amplified resist composition. There can be provided a resist
composition which has etching resistance in a practical use level, and is
excellent in an adhesion property with a substrate and an affinity with a
developer, and has a sensitivity and resolving power which is far
excellent compared with a conventional one, wherein swelling is small at
the time of development, especially for photolithography which uses a
high-energy beam as a light source, and especially be provided a
chemically amplified resist composition ##STR00001##