Provided is a field emission display (FED) with a carbon nanotube emitter
and a method of manufacturing the same. A gate stack that surrounds the
CNT emitter has a mask layer that covers an emitter electrode adjacent to
the CNT emitter, and a gate insulating film, a gate electrode, a focus
gate insulating film (SiO.sub.x, X<2), and a focus gate electrode
formed on the mask layer. The focus gate insulating film has a thickness
2 .mu.m or more, and preferably 3.about.15 .mu.m and is preferably made
using PECVD. A flow rate of silane and nitric acid for forming the focus
gate insulating film and/or the gate insulating film are maintained at
50.about.700 sccm and 700.about.4,500 sccm, respectively. By doing so and
by making the oxide thick, the oxide is less apt to crack and thus less
apt to generate a leakage current.