An N type semiconductor layer is epitaxially grown on a P type semiconductor substrate of which one end is grounded, and an element isolation layer made of a P type diffusion layer is formed by means of diffusion around the N type semiconductor layer in order to electrically isolate the N type semiconductor layer. The metal layer which is located above the N type semiconductor layer and which forms a wire or a bonding pad is isolated from the N type semiconductor layer in which a diffusion layer or the like has been formed by an insulating film. An N type buried diffusion layer having an impurity concentration higher than that of the N type semiconductor layer is provided between the P type semiconductor substrate and the N type semiconductor layer. In addition, a P type semiconductor layer is formed by means of diffusion between the insulating film and the N type semiconductor layer plus the element isolation layer.

 
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> Etchant for etching nitride and method for removing a nitride layer using the same

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