A method of moving an object includes a step of fixing the object to an object-moving device, a step of moving the object to a prescribed position by the object-moving device, and a step of releasing the object from the object-moving device. The fixing step includes forming a deposit for fixation of the object to the object-moving device by applying a first corpuscular beam in a first gas to form a deposit. The releasing step includes etching the deposit by applying a second corpuscular beam in contact with a second gas.