A zinc oxide crystal growth substrate is disclosed. The zinc oxide crystal
growth substrate includes a thin layer of single crystal zinc oxide
deposited on an self supporting substrate surface by a chemical
deposition process. The chemical deposition process is selected from RF
sputtering, CVD (chemical vapor deposition), MOCVD (metal organic
chemical vapor deposition), spin coating, electrophoresis, and
hydrothermal growth processes. The self supporting substrate may be
amorphous, polycrystalline, or crystalline. The thin layer of zinc oxide
has a crystal lattice which permits the crystal growth of a crystal
compatible with zinc oxide. The compatible crystal has a lattice
parameter within about 5% of a corresponding lattice parameter of the
zinc oxide.