A system and method for predicting yield of integrated circuits includes
at least one type of characterization vehicle which incorporates at least
one feature which is representative of at least one type of feature to be
incorporated in the final integrated circuit product. The
characterization vehicle is subjected to at least one of the process
operations making up the fabrication cycle to be used in fabricating the
integrated circuit product in order to produce a yield model. The yield
model embodies a layout as defined by the characterization vehicle and
preferably includes features which facilitate the gathering of electrical
test data and testing of prototype sections at operating speeds. An
extraction engine extracts predetermined layout attributes from a
proposed product layout. Operating on the yield model, the extraction
engine produces yield predictions as a function of layout attributes and
broken down by layers or steps in the fabrication process. These yield
predictions are then used to determine which areas in the fabrication
process require the most improvement.