According to one exemplary embodiment, a method for integrating first and
second metal layers on a substrate to form a dual metal NMOS gate and
PMOS gate comprises depositing a dielectric layer over an NMOS region and
a PMOS region of the substrate. The method further comprises depositing
the first metal layer over dielectric layer. The method further comprises
depositing the second metal layer over the first metal layer. The method
further comprises implanting nitrogen in the NMOS region of substrate and
converting a first portion of the first metal layer into a metal oxide
layer and converting a second portion of the first metal layer into metal
nitride layer. The method further comprises forming the NMOS gate and the
PMOS gate, where the NMOS gate comprises a segment of metal nitride layer
and the PMOS gate comprises a segment of the metal oxide layer.