The present invention provides a diagnostic system for plasma processing,
wherein the diagnostic system comprises a multi-modal resonator, a power
source, a detector, and a controller. The controller is coupled to the
power source and the detector and it is configured to provide a
man-machine interface for performing several monitoring and controlling
functions associated with the diagnostic system including: a Gunn diode
voltage monitor, a Gunn diode current monitor, a varactor diode voltage
monitor, a detector voltage monitor, a varactor voltage control, a
varactor voltage sweep control, a resonance lock-on control, a graphical
user control, and an electron density monitor. The diagnostic system can
further provide a remote controller coupled to the controller and
configured to provide a remote man-machine interface. The remote
man-machine interface. The remote man-machine interface can provide a
graphical user interface in order to permit remote control of the
diagnostic system by an operator. In addition, the present invention
provides several methods of controlling the diagnostic system in order to
perform both monitor and control functions.