A 1.times. projection optical system for deep ultra-violet (DUV)
photolithography is disclosed. The optical system is a modified Dyson
system capable of imaging a relatively large field at high numerical
apertures at DUV wavelengths. The optical system includes a lens group
having first and second prisms and four lenses having a
positive-negative-positive negative arrangement as arranged in order from
the prisms toward the mirror. A projection photolithography system that
employs the projection optical system of the invention is also disclosed.