A positive resist composition comprising a mixture of an alkali-soluble
novolak resin prepared using m-cresol, p-cresol and 2,5-xylenol as
starting reactants and a phenolic compound, wherein the hydrogen atoms of
all hydroxyl groups are substituted in a proportion of 0.03 0.05 mol per
hydrogen atom with 1,2-naphthoquinonediazidosulfonyl ester groups, has
uniformity, high sensitivity and high resolution, and is improved in heat
resistance, film retention, substrate adhesion, and storage stability.