A method is provided for manufacturing a capacitor including the steps of
forming a lower electrode on a substrate, forming an insulation film
formed of a perovskite type metal oxide on the lower electrode, and
forming an upper electrode on the insulation film. The step of forming
the insulation film includes the steps of coating a dispersion liquid in
which fine crystal powder of a second metal oxide of a perovskite type in
a liquid containing a precursor compound of a first metal oxide of a
perovskite type on the lower electrode, and performing a heat treatment
of the dispersion liquid after coating.