A fluid impermeable thin film is fabricated on a porous substrate by
depositing a material having a certain spatial oxidation expansion. After
deposition, the material is oxidized whereby the deposited material
expands and forms a void free film on top of the porous substrate. The
snuggly contacting grain boundaries of the void free film may recombine
to a continuous thin film that has a thickness of only a fraction of 1
.mu.m and is substantially fluid impermeable. The small film height
contributes to a high ionic conductivity that makes the thin film a
preferred choice for a fuel cell electrolyte membrane enabling efficient
fuel cell operation at temperatures well below 500.degree. C.