A method and an apparatus for organizing production data is provided. The
method comprises performing at least one process run of semiconductor
devices, and recording at least one manufacturing tag associated with the
process run of semiconductor devices. The method further comprises
performing metrology upon at least one process run of the semiconductor
device for acquiring metrology data and for performing a metrology data
stackification process upon the metrology data using the manufacturing
tag for organizing and stacking the metrology data. The method further
comprises modifying at least one control parameter is modified based upon
the stacked metrology data.