Ferroelectric memory cells (3) are presented, in which a cell resistor (R)
is integrated into the cell capacitor (C) to inhibit charge accumulation
or charge loss at the cell storage node (SN) when the cell (3) is not
being accessed while avoiding significant disruption of memory cell
access operations. Methods (100, 200) are provided for fabricating
ferroelectric memory cells (3) and ferroelectric capacitors (C), in which
a parallel resistance (R) is integrated in the capacitor ferroelectric
material (20) or in an encapsulation layer (46) formed over the patterned
capacitor structure (C).