A dicing adhesive sheet having a base film and an adhesive layer formed on
the base film is characterized in that the thickness of the adhesive
layer ranges from 1 to 10 .mu.m and the adhesive layer has an sticking
temperature such that the adhesion measured when 180.degree. peeling at
23.degree. C. of the dicing sheet is conducted (the peeling rate is 300
mm/min) after it is applied to a silicon mirror wafer is 10 N/25 mm or
more. In a dicing method using such a dicing adhesive sheet, the
production yield of a diced body such as a semiconductor wafer is high,
and chipping the dicing is prevented.