A lithographic optical system is presented herein. The optical system
comprises a housing with two optically transparent windows and at least
one moveable lens therein, as well as at least one other optical element
outside said housing. By providing at least one optical element outside
the housing, possible deleterious influences thereof on the optical
quality of the moveable lens may be diminished. The housing with the
moveable lens may be purged, and may be provided with a linear motor and
a gas bearing for contactless moving of the lens.