A method for correcting line width variation occurring during a
development process in fabricating a photomask and a recording medium in
which the exposure method is recorded is provided, wherein pattern line
width variation occurring in a development process with respect to a
desirable pattern is estimated, and a corrective exposure is performed
using a dose or bias of an electron beam corresponding to the estimated
pattern line width variation. Accordingly, pattern line width variation
occurring during a development process can be reduced.