A measurement method is provided, which enables to obtain a
two-dimensional image with better quantitative-ability by suppressing the
influence of the charge-up, when the two-dimensional secondary ion image
is obtained for a biological material fixed on a substrate having a high
resistivity by utilizing a TOF-SIMS method in a certain wide area. A
two-dimensional image having considerably high positioning
resolution-ability can be obtained by the procedure in which the pulsed
primary ion beam is irradiated at a spot, and the pulse-wise
spot-applications of the primary ion beam and the simultaneous detection
of the secondary ion generated from the irradiated primary ion beam
proceed along with a discontinuous scanning pattern, and eventually the
results of these secondary ion measurements are reconstructed into a
two-dimensional image in line with the aforementioned discontinuous
scanning pattern.