A method is provided for fabricating in a thermal evaporation system a polycrystalline film capable of directly detecting radiation. Source material is placed in a container, and the container is evacuated to create vacuum within the container. The source material is heated to evaporate the source material for depositing on a substrate. The polycrystalline film is used in as deposited form to detect the radiation.

 
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> Thin film transistor array substrate, method for manufacturing the same and system for inspecting the substrate

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