There are provided a novel norbornene derivative which is a material for a
chemically amplifying type photoresist for F.sub.2 laser, possesses
excellent transparency and improved dry etching resistivity and has a
fluorine-containing ketone unit or fluorine-containing tertiary alcohol
unit directly bonded to the norbornene backbone; a fluorine-containing
polymer obtained by using the norbornene derivative as a copolymerizable
monomer; and a chemically amplifying type photoresist composition
comprising the fluorine-containing polymer, a photoacid generator and a
solvent.