An electrical property evaluation apparatus for measuring an electrical
property of an object includes a magnetic field generating mechanism that
generates a magnetic field in a target area on the object, and a magnetic
sensor for measuring the magnetic field near the target area. A
cantilever having a conducting probe is supported so that the probe can
be brought into contact with the target area. A bending measurement
mechanism measures an amount of bending of the cantilever when the probe
is brought into contact with the object. A control section controls a
moving mechanism to maintain the bending amount of the cantilever
constant. A voltage source applies a voltage to the probe, and an
electrical property measuring section measures a current or an electrical
resistance between the probe and the object in contact with each other.