There is provided a reconfigurable scanning electron microscope (RSEM)
(100) comprising: (a) a gun assembly (110) and an associated electron
optical column (120) for generating an electron beam (600), for
demagnifying the electron beam (600) to generate an electron probe
(C.sub.3) and for scanning the probe (C.sub.3) across a sample (190); (b)
an electron detector (550) for detecting emissions from the sample (190)
in response to scanned electron probe irradiation thereof and for
generating a corresponding detected signal (S.sub.d) indicative of the
magnitude of the emissions; and (c) a display (170) for receiving the
detected signal (S.sub.d) and scanning signals (x, y) indicative of the
position of the probe (C.sub.3) relative to the sample (190) for
generating the image of the sample (190). The RSEM (100) is distinguished
in that it further includes aperture bearing members (500, 520), each
member (500, 520) including an associated electon-beam transmissive
aperture, for at least partially gaseously isolating the gun assembly
(110) and the electron optical column (110) from the sample (190),
thereby enabling the RSEM (100) to be reconfigurable as a high-vacuum
scanning electron microscope and also as an environmental scanning
electron microscope, the RSEM (100) being reconfigurable to include no
aperture members, one aperture member (500, 750) and a plurality of
aperture members (500, 750; 520 850, 860).