A sensing contact probe includes a beam support and a probe. The probe has a bent beam body that extends from the beam support to a probe tip face that has a position and faces in an angular direction. The bent beam body has first and second beam layers bonded together and have differing residual stresses that bend the beam body. A stress relief region is formed in the bent beam body. The stress relief region has an adjusted stress property that adjusts the bending to control the probe tip face position and angular direction.