A single crystal of quartz thin film and a production method therefor are
provided. A method for producing a quartz epitaxial thin film comprises
the steps of vaporizing a silicon alkoxide as a silicon source under
atmospheric pressure to introduce the silicon alkoxide to a substrate
with hydrogen chloride as a reaction promoter, and reacting ethyl
silicate with oxygen to deposit a quartz on the substrate. The single
crystal of quartz thin film has excellent crystalinity, and optical
properties.