Pathways to rapid and reliable fabrication of three-dimensional
nanostructures are provided. Simple methods are described for the
production of well-ordered, multilevel nanostructures. This is
accomplished by patterning block copolymer templates with selective
exposure to a radiation source. The resulting multi-scale lithographic
template can be treated with post-fabrication steps to produce
multilevel, three-dimensional, integrated nanoscale media, devices, and
systems.