A system for focusing broadband light within a reflectometer includes a
concave spherical mirror for gathering light from the surface of a sample
under inspection. The concave spherical mirror projects the received
light to a convex spherical mirror. The combination of the two mirrors
captures the light diverging from the sample and collimates the light
into parallel rays. The light can then be passed through an aperture
prior to entering a detector. Each of the two mirrors is fabricated as an
off-axis section of a spherical mirror and positioned to form a partial
Schwarzschild design without the associated problem of a central
obscuration.